SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

(all prices in USD, Ex-Works Singapore)

chuck outer ring
A-6549

OEM Brand: SEZ
OEM Part#: 2301518
CPU board PCA-6189
A10-0018-01

OEM Brand: SEZ
OEM Part#:
Bellow pump PE20
A-7648

OEM Brand: SEZ
OEM Part#: 2002017 / 2201786
Stepper motor controller board
A-7404R

OEM Brand: SEZ
OEM Part#: 2010013
Bellow pump PW-5MA
A-7740

OEM Brand: SEZ
OEM Part#:
Stepper Motor P850 complete
A-6514V2

OEM Brand: SEZ
OEM Part#: 2004013 (676-129532-001) / 2004014 (unconfirmed)
Robot linear track motor
A-6628

OEM Brand: SEZ
OEM Part#: 2313742
Inner ring
A-7408

OEM Brand: SEZ
OEM Part#: 2320756
Elevating Motor
A-6953R

OEM Brand: SEZ
OEM Part#: 2310245
Chuck Motor
A-6954R

OEM Brand: SEZ
OEM Part#: 2310243
Ceramic end effector
A-6052

OEM Brand: SEZ
OEM Part#: (2304011 + 2013729 x2 + 2013730 x2) assembly
Nippon Pillar Pump PE10MA
A-7459

OEM Brand: SEZ
OEM Part#: