News & Announcements.
News
July 30, 2025
Major Refurbishment of DV34 System
- Dispenser System: 2 chemical medium and 1 DI Water
- Wafer processing: front side and backside application, with flip station
- CDS with buffering: refurbished with automatic DI water and HF replenishment
- New DI CO2 module: change and configure DI CO2 module
- Mechanical overhaul: refurbish dual arm robot, elevating unit and drive unit
- Chuck refurbish: 4 chamber NC chuck refurbishment
July 30, 2025
SP203 Elevating & Chuck Drive System Upgrade
Major replacement from the obsolete SP203 Elevating & Chuck Drive System to unexpected tool downtime
- Obsolete Components: Key parts and the Hauser system are no longer available;
- Operational Risk: High risk of unexpected tool downtime
- Upgrade Scope:
- Replace obsolete chuck and elevating AC motion systems
- Motor and amplifier replacement with newer, supported components
- Proven Solution: Successfully tested and upgraded on multiple SP203 tools.
- Benefit: Mitigates risk of extended downtime and ensures continued tool reliability.
April 4, 2025
Major SP203 upgrade from 2 Mediums to 3 Mediums
- Medium reconfigure: reconfigure med1 & med2 for different type of chemical
- Adding new medium: provide & install new CHC3 (include process tank, PS&PE 20 pump etc)
- inline heating system upgrade: change out and add inline heater, heating range 35-60C, +/- 2C (45-60C); 150 process wafers per medium marathon
- installation & Process qualify onsite
April 4, 2025
SP Series HEX Indirect Heating System to Inline Heater System!
Major upgrade from the traditional SP Series HEX Indirect Heating System to the advanced Inline Heater System—delivering unmatched efficiency, sustainability, and cost savings!
- ✅ Massive Energy Savings – 60-80% reduction in electricity consumption, saving 66kW per day!
- ✅ Significant Water Conservation – 600 liters of water saved daily
- ✅ Eco-Friendly & Safe – No risk of chemical leaks into city water drainage, ensuring compliance and environmental safety.
- ✅ Lower Maintenance & Reduced Waste – maximizing uptime and efficiency.
January 30, 2025
MAJOR SP304 Refurbishment Complete!
- Platform Adaptability: 12-inch chuck systems to 8-inch chucks
- FOUP to Cassette Conversion
- Component Restoration: CDS, Boards, Robots etc
- Standard to Bernoulli handling
- Chemical system revitalization
- Critical unit refurbish: HEX, Chuck drive & elevating etc
January 15, 2025
Chemical Analyzer for Chemical Bath Life Extension >50%
Revolutionizing Chemical Bath Management with Real-time Monitoring
We’re excited to introduce a significant advancement in our chemical bath management process: the implementation of a real-time chemical concentration analyzer. This innovative technology allows us to:
- Monitor Chemical Concentration Continuously: .
- Prevent Contamination and Errors:
- Extend Chemical Bath Life: spiking water/chemical to maintain concentration, able to achieve close to double bath life extension
