SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

(all prices in USD, Ex-Works Singapore)

200mm chuck refurb kit
A-6559

OEM Brand: SEZ
OEM Part#:
200mm chuck spring
A-6035

OEM Brand: SEZ
OEM Part#: 2005070
200mm conductive chuck pins
AB-8387

OEM Brand: SEZ
OEM Part#: 2346123
200mm ECCENTRIC PIN
A-7126

OEM Brand: SEZ
OEM Part#: 2346123
200mm pin chuck center piece PET
A-6558

OEM Brand: SEZ
OEM Part#: 2015192
200mm standard pin chuck
A-7140

OEM Brand: SEZ
OEM Part#: 2301520-01 (replaces 2014243)
200mm step/undercut chuck
A-7987

OEM Brand: SEZ
OEM Part#: 2007143
203/223/4200 Chuck
A-6227

OEM Brand: SEZ
OEM Part#: 2005084, 2005088, 2025697, 2301516
203/223 Segment V2 process chamber
A10-0037-01

OEM Brand: SEZ
OEM Part#: 2320816
203 Aperture process chamber
A10-0038-01

OEM Brand: SEZ
OEM Part#: 2320813
203/Insert inner rings
A-7781

OEM Brand: SEZ
OEM Part#: 2320753
3/2-way Valve
A-6619

OEM Brand: SEZ
OEM Part#: 2022937/2348093