SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

(all prices in USD, Ex-Works Singapore)

Sensor
A-6529V2

OEM Brand: SEZ
OEM Part#: 2028132
Fuse
A10-0040-01

OEM Brand: SEZ
OEM Part#: 2000872
DV chuck base
A10-0039-01

OEM Brand: SEZ
OEM Part#:
203/223 Segment V2 process chamber
A10-0037-01

OEM Brand: SEZ
OEM Part#: 2320816
203 Aperture process chamber
A10-0038-01

OEM Brand: SEZ
OEM Part#: 2320813
pH sensor electrode
A10-0035-01

OEM Brand: LAM
OEM Part#:
1/8″ PFA Tubing
A-7977

OEM Brand: SEZ
OEM Part#:
Exhaust Ducting
A-7113

OEM Brand: SEZ
OEM Part#: 2000753 (phased out) ; replaced by as listed improved version 2027739
6x4mm PFA tubing
A-7756

OEM Brand: SEZ
OEM Part#:
Silicon Insulation
AB-6041

OEM Brand: SEZ
OEM Part#: 2025226
PTFE-Teflon sheet
A-7110

OEM Brand: SEZ
OEM Part#: 2000781
pfa tubing
A-7429

OEM Brand: SEZ
OEM Part#: 2003964