SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

(all prices in USD, Ex-Works Singapore)

Electronics Board, CPU board
A-6164V2

OEM Brand: SEZ
OEM Part#: 2008037/2011924/2016690/2026053/2303162/2353233
Elevating Module servo motor
A-7062

OEM Brand: SEZ
OEM Part#: 2310259
Mass Flow Controller
A-7290

OEM Brand: SEZ
OEM Part#: 2018675
chemical process tank
A-7320

OEM Brand: SEZ
OEM Part#: 2013142
Cable Motor
A-7578

OEM Brand: SEZ
OEM Part#: 2017068 (3M) / 2015263 (2.5M) / 684-107667-00
200mm chuck refurb kit
A-6559

OEM Brand: SEZ
OEM Part#:
300mm ECCENTRIC CHUCK PIN
A-6118

OEM Brand: SEZ
OEM Part#: 2008086-01
chuck drive unit servo motor
A-7057

OEM Brand: SEZ
OEM Part#: 2310246-00
Precision plug valve
A-7297

OEM Brand: SEZ
OEM Part#: 2004442
Bellow pump PW-10MA
A-7739

OEM Brand: SEZ
OEM Part#:
WetSpec SECS-II/ HSMS
A10-0088-01

OEM Brand:
OEM Part#:
300mm ECCENTRIC PIN
A10-0050-01

OEM Brand: Lam/SEZ
OEM Part#: 2008086-01