MAJOR SP304 Refurbishment Completed!
MAJOR SP304 Refurbishment Completed!
Our Equipment: Major SP304 Refurbishment Completed!
We are excited to announce the successful completion of a major refurbishment project aimed at enhancing our manufacturing capabilities. This initiative involved a comprehensive overhaul of critical equipment, focusing on key areas:
Core Refurbishment Scope:
- Platform Adaptability: Successfully converted 12-inch chuck systems to accommodate 8-inch chucks on 12-inch shafts, expanding processing flexibility.
- FOUP-to-Cassette Conversion: Transitioned from FOUP to open cassette handling, improving efficiency and reducing costs.
- Component Restoration: Replaced missing CDS cabinets, robots, and CDS PCs, ensuring seamless system functionality.
- Precision Handling: Implemented Bernoulli handling for delicate and precise wafer transfer, minimizing damage and maximizing yield.
- Critical Unit Refurbishment: Overhauled elevating units, chuck drive units, heaters, and HEX tanks to restore optimal performance.
- Chemical System Revitalization: Replaced essential chemical components to maintain purity and process reliability.
Benefits of Refurbishment:
- Enhanced Productivity: Improved equipment reliability and efficiency lead to increased production capacity.
- Cost Reduction: Reduced downtime, lower maintenance costs, and optimized resource utilization contribute to significant savings.
- Improved Product Quality: Precise control and consistent processing conditions ensure higher-quality products.
- Extended Equipment Lifespan: Refurbishment prolongs the operational life of equipment, deferring capital expenditure on new systems.
- Environmental Sustainability: Reduced energy consumption and minimized waste generation align with our commitment to eco-friendly practices.
We remain dedicated to delivering innovative solutions and high-quality products to our valued customers.
Unit |
Section |
Specification |
Main unit |
Wafer size |
8inch |
|
Wafer Slot |
25 slot |
|
Load port |
Manual load ports |
|
Robot End-effector |
Bernoulli End effector |
|
Swivel Lever |
Bernoulli |
|
Process chuck |
Bernoulli pin chuck for SP304 |
|
Heating system |
Single x 1, Double x 2 |
|
Flow meter |
3 liter |
|
Exhaust |
Up side by PVC |
|
Drain |
Down side with PVC adaptor |
|
DI water filter |
10 inch filter housing |
|
Chuck N2 Flow |
MFC |
|
Sound Module |
Install |
|
Ion system |
Install |
|
GEM Support |
SECS II |
|
MU Drippan |
PP with 2 leak sensors |
Refurbish job scope |
Robot & controller |
Overhauled |
|
Chemical pumps |
Overhauled |
|
Chemical valves, fittings |
Overhauled |
|
Heat exchangers |
Overhauled |
|
Motors |
Overhauled |
|
HEX coil |
Brand new |
|
MFC |
Brand new or Overhauled |
|
Process chuck |
Brand new |
|
Suck back valves |
Brand new |
|
Bernoulli handling kit |
Brand new |
|
Motor’s belts |
Brand new |
|
Chemical lines |
Brand new |
|
N2 fitler |
Brand new |
|
DI filter |
Brand new |
|
Main Body & CDS Body |
cleaned and paineted |
Maraton Test |
Bernoulli handling test |
500 wfs |
|
Chemistry line leak test |
No leak |
|
Heat up test |
45 degree, 65 degree |



