SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

SEZ EQUIPMENT

Our portfolio of supported
SEZ equipment (LAM Research) and Parts.

(all prices in USD, Ex-Works Singapore)

  •

    Ceramic end effector

    A-7229

    OEM Brand: SEZ
    OEM Part#: 2306241-00 / -01
  •

    Ceramic end effector

    A-7227

    OEM Brand: SEZ
    OEM Part#: 2306242-00 / -01
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    PRESSURE SENSOR CONTROLLER

    A-7633

    OEM Brand: SEZ
    OEM Part#: 2325268
  •

    Mass Flowmeter

    A-7219

    OEM Brand: SEZ
    OEM Part#: 2001509
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    AC input AT Power Supply

    A-7217

    OEM Brand: SEZ
    OEM Part#: 
  •

    Elevating Motor

    A-6953R

    OEM Brand: SEZ
    OEM Part#: 2310245
  •

    Shutter door DC micromotor

    A-6929

    OEM Brand: SEZ
    OEM Part#: 2009291
  •

    Standard pin chuck 150mm

    A-6890

    OEM Brand: SEZ
    OEM Part#: 2016721 (replaces 2007004, 2014282, 2007556, 853-103902-001, 2322699)
  •

    chuck drive unit servo motor

    A-7057

    OEM Brand: SEZ
    OEM Part#: 2310246-00
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    Nippon Pillar Pump PE10MA

    A-7459R

    OEM Brand: SEZ
    OEM Part#: 
  •

    Swivel module motor

    A-7033

    OEM Brand: SEZ
    OEM Part#: 2305959-00 / 2324149 / 853-134488-001
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    CE-ATM 407B-2-S ROBOT

    A-7339R

    OEM Brand: SEZ
    OEM Part#: 2007572 / 2013734 / 2200874 (ATM407C-2CE, "C" version)