MAJOR SP304 Refurbishment Completed!

Our Equipment: Major SP304 Refurbishment Completed!

We are excited to announce the successful completion of a major refurbishment project aimed at enhancing our manufacturing capabilities. This initiative involved a comprehensive overhaul of critical equipment, focusing on key areas:

Core Refurbishment Scope:

  • Platform Adaptability: Successfully converted 12-inch chuck systems to accommodate 8-inch chucks on 12-inch shafts, expanding processing flexibility.
  • FOUP-to-Cassette Conversion: Transitioned from FOUP to open cassette handling, improving efficiency and reducing costs.
  • Component Restoration: Replaced missing CDS cabinets, robots, and CDS PCs, ensuring seamless system functionality.
  • Precision Handling: Implemented Bernoulli handling for delicate and precise wafer transfer, minimizing damage and maximizing yield.
  • Critical Unit Refurbishment: Overhauled elevating units, chuck drive units, heaters, and HEX tanks to restore optimal performance.
  • Chemical System Revitalization: Replaced essential chemical components to maintain purity and process reliability.

Benefits of Refurbishment:

  • Enhanced Productivity: Improved equipment reliability and efficiency lead to increased production capacity.
  • Cost Reduction: Reduced downtime, lower maintenance costs, and optimized resource utilization contribute to significant savings.
  • Improved Product Quality: Precise control and consistent processing conditions ensure higher-quality products.
  • Extended Equipment Lifespan: Refurbishment prolongs the operational life of equipment, deferring capital expenditure on new systems.
  • Environmental Sustainability: Reduced energy consumption and minimized waste generation align with our commitment to eco-friendly practices.

We remain dedicated to delivering innovative solutions and high-quality products to our valued customers.

Unit

Section

Specification

Main unit

Wafer size

8inch

Wafer Slot

25 slot

Load port

Manual load ports

Robot End-effector

Bernoulli End effector

Swivel Lever

Bernoulli

Process chuck

Bernoulli pin chuck for SP304

Heating system

Single x 1, Double x 2

Flow meter

3 liter

Exhaust

Up side by PVC

Drain

Down side with PVC adaptor

DI water filter

10 inch filter housing

Chuck N2 Flow

MFC

Sound Module

Install

Ion system

Install

GEM Support

SECS II

MU Drippan

PP with 2 leak sensors

Refurbish job scope

Robot & controller

Overhauled

Chemical pumps

Overhauled

Chemical valves, fittings

Overhauled

Heat exchangers

Overhauled

Motors

Overhauled

HEX coil

Brand new

MFC

Brand new or Overhauled

Process chuck

Brand new

Suck back valves

Brand new

Bernoulli handling kit

Brand new

Motor’s belts

Brand new

Chemical lines

Brand new

N2 fitler

Brand new

DI filter

Brand new

Main Body & CDS Body

cleaned and paineted

Maraton Test

Bernoulli handling test

500 wfs

Chemistry line leak test

No leak

Heat up test

45 degree, 65 degree