Major SP203 upgrade from 2 Mediums to 3 Mediums

Major System Upgrade for Enhanced Chemical Processing & Efficiency

Upgrade of SP203 system from 2 Mediums to 3 Mediums with reconfigured chemistry, new inline heating, and expanded capabilities for advanced wafer processing.

Medium Reconfiguration

🔹 Med1 Conversion

    • From: Poly Tech
    • To: Sub Etch
    • Operating Temp: 29°C

🔹 Med2 Conversion

    • From: HF 50%
    • To: SF Etch
    • Operating Temp: 25°C

Adding New Medium (CHC3 for HF 50%)

New CHC3 Setup (Assembly & testing @Singapore)

New medium CDS with following:

  • Standard Process Tank
  • PS20 Process Pump & PE20 Return Pump
  • Standard Chemistry Filter Housing
  • Med3 Flow Plan Integration in Main Unit
    • New Consumables for main unit:
      • Suckback Valves, Chamber Seals, O-Rings
  • Pre-Shipment Functional Testing

Inline Heating System Upgrade for All 3 Mediums

Upgrade Kit Installation on SP203 Tool

  • Replace inline heaters for Med1 & Med2
  • Add new inline heater for CHC3 (Med3)
  • Heating Range: 35–60°C
  • Temperature Tolerance:
    • 35–45°C: ±1.0°C
    • 45–60°C: ±2.0°C
  • function test: 150 process wafers per medium marathon

Onsite Installation & Process Qualification

  • Onsite installation & system validation
  • Full process qualification for stability & performance