Major Refurbishment of DV34 System

Major Refurbishment of DV34 System: Enhanced Performance and Flexibility

We’re excited to announce the successful refurbishment of our DV34 system, a key project designed to significantly boost customer output and process reliability. This comprehensive upgrade incorporates features and replace critical components to meet customer’s operational needs.

Key Refurbishment Highlights:

  • Dispenser System: The DV34’s dispenser system with two chemical medium dispense and one for DI water, ensuring precise and efficient chemical delivery.
  • Flexible Wafer Processing: DV34 tool with single-wafer process method for both front side and backside applications, complete with a flip station, allowing for greater control and precision in our operations.
  • Automated Chemical Replenishment: The integrated CDS (Chemical Delivery System) refurbished with automatic DI water and HF replenishment, minimizing manual intervention and ensuring continuous operation. Buffering function with longer chemical bath life.
  • Precise Temperature Control: The system maintains strict temperature control with settings at 40°C and 30°C, both with a tight limit of +/-1°C, crucial for maintaining process stability and quality.
  • New DICO2 Module: tool configured a new DICO2 module, enhancing the system’s capabilities to meet customer’s operational needs.
  • Comprehensive Mechanical Overhaul: The refurbishment included a thorough overhaul of critical mechanical components, such as the dual-arm robot, elevating unit, and drive unit, ensuring smooth and reliable movement.
  • Refurbish Chuck System: The 4-chamber NC chuck has been refurbished, providing improved wafer handling and processing integrity.
  • Chemical Parts Replacement: All essential chemical parts have been replaced to guarantee system longevity and prevent contamination.

This extensive refurbishment not only extends the lifespan of our DV34 system but also significantly enhances its capabilities, allowing us to achieve greater precision, efficiency, and reliability in our customer’s production processes.